Mu gukora wafer ya semiconductor, inzira ya lithography ni intambwe y'ingenzi, ishingiye ku buryo bunonosoye kandi igena umusaruro wa chip. Nk' "ishingiro ry'ishyirwa ahagaragara no gushushanya" mu gikorwa cyo gukora wafer, lithography ikubiyemo imikorere yose - harimo no gusiga irangi, kugaragara, guteza imbere, gushushanya, no gusukura amazi - kandi ishyiraho ibisabwa bikomeye ku isuku y'ibidukikije, kugenzura umwanda, kurinda amashanyarazi, no kwirinda imiti. Uduce tw'umukungugu wo ku rwego rwa micron, kwimuka kwa iyoni, no gusohora kwa electrostatic byihuse byose bishobora gutera inenge zo kurwanya fotoresiste, kugorana kw'imiterere, oxidation ya wafer, na micro-short circuits mu circuits, bigatuma wafers zose zicika kandi bigatera igihombo kinini mu musaruro. FAB nyinshi zigorwa no kunoza umusaruro w'imikorere yazo ya fotolisitography. Nubwo ibikoresho, imikorere, n'ibipimo by'ibidukikije byose biri mu buryo bukwiye, ikibazo gikunze kuba mu bikoresho bisa n'ibidafite akamaro byo kurinda intoki. Uturindantoki two mu rwego rwa 1,000 cyangwa uturindantoki two mu rwego rw'inganda ntabwo dukwiriye na gato ku rwego rwo hejuru cyane rw'igikorwa cya fotolisitography.
Kuki gukoresha uturindantoki dusanzwe two gusukura bibujijwe cyane muri gahunda ya Lithography?
Ibisigazwa by'ifu bitera kwanduzwa n'ubushyuhe
Iyoni nyinshi za sulfur na chloride zangiza imiyoboro iri kuri wafers
Amashanyarazi adahindagurika yabuze uburyo bwo kuyagenzura, bituma hangirika imashini ikoresha ikoranabuhanga rya "precision photolithography wafer"
Kuvunika no gushonga, bigatera inenge mu bikorwa byo gukora ibintu by'amahanga
Udupfukantoki twa LjieClean two mu bwoko bwa 100 tudafite ifu ya Nitrile
Suzhou Leader yibanda ku rwego rw’inganda za semiconductor wafer no gukemura ibibazo biri mu nzira ya lithography, twakoze uturindantoki twihariye twa nitrile two mu cyiciro cya 100 tudafite ifu kandi tudakoresha imyuka myinshi, twujuje neza ibisabwa mu ikorwa ry’inzira yose ya lithography ya wafer, bigatuma tuba ibikoresho birinda abantu benshi n’ibigo byinshi bipakira kandi bipima wafer.
1. Uburyo bwo kutagira ifu bushingiye kuri dichloride: nta ifu yandujwe muri gahunda yo gufotora
Ubu buryo bukoresheje uburyo bwo gusukura chlorine mu buryo bwihariye, ntibusaba kongeramo ibindi bikoresho by’inyongera nka talc, cornstarch, cyangwa amavuta ya silikoni mu gihe cyose cy’igikorwa. Butuma ikoreshwa neza muri icyo gikorwa ubwacyo, bukavanaho uduce tw’ifu n’ibisigazwa by’amavuta ya silikoni byanduza fotoresiste aho byaturutse, bityo bigakemura burundu inenge z’utundi duce tw’inyuma mu gikorwa cyo gufotora.
2 Gusukura amazi meza cyane mu byiciro byinshi bituma sulfure nkeya, chlorine nkeya, kandi ingano yayo ikaba nkeya
Binyuze mu ngendo nyinshi zo koza cyane n'amazi meza cyane, inyongeramusaruro n'ibisigazwa byo hejuru birakurwaho. Ingano ya sulfure, chlorine, na iyoni z'icyuma zishongeshwa igenzurwa cyane, bigatuma NVR nkeya (ibisigazwa bidahinduka). Ibi birinda ogisijeni ya wafer, kwangirika kw'ibisigazwa, no gushonga, bigatuma uturindantoki duhuzwa neza n'uburyo busaba lithography ku bisigazwa bya santimetero 8 na 12.
Uburinzi 3 bwa ESD bwahinduwe mu buryo bukoreshwa mu kurinda uduce tw’amashanyarazi duto cyane
Bitandukanye n'uturindantoki dukoreshwa mu bucuruzi dufite udupira tw'igihe gito two gupfuka, Gonars ikoresha ikoranabuhanga ryo guhindura ibintu mu buryo busanzwe ku gikoresho cy'ibanze cya nitrile. Ibi bituma habaho ubudahangarwa buhamye kandi bungana, bigasibanganya amashanyarazi adahindagurika mu gihe cyose cy'igikorwa kugira ngo hirindwe ko amashanyarazi adahindagurika ashobora kwangiza imiterere y'izuba no kwangiza imiyoboro ya wafer. Ikwiriye intambwe zo gushushanya nk'iy'ikwirakwizwa no gukura.
4Flexible kandi Snug Fit, Ikwiriye Imikorere ya Micron-Level Precision
Ibikoresho by'uturindantoki byoroshye kandi bihuye n'imiterere y'ukuboko. Bifite imiterere idacika ku ntoki, ni ibyoroheje kandi ntibinini, bigatuma biba byiza mu bikorwa by'ubuhanga nko gufata neza icyuma gikoresha ikoranabuhanga, gutunganya ibikoresho, no kugenzura neza. Bitanga uburyo bwo kugenda nta mbogamizi kandi bikarinda kunyerera, bigagabanya neza kwangirika guterwa n'udusimba mu gihe cyo gukora n'intoki. Byongeye kandi, birwanya ibyuma bisukura ikoranabuhanga n'aside na alkali, kandi bigumaho igihe kirekire bitarasaza cyangwa ngo bicike ndetse no mu gihe kirekire.
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✅ Gupfunyika mu buryo bw'ingufu bubiri bikuraho ubwandu bwa kabiri
Ibikoresho byarangiye bipfunyikwa mu gihe cyose cy’igikorwa cyose mu cyumba cyo gusukura cya Class 100 hakoreshejwe ipaki ifite ifu y’ibikoresho bibiri, ibi bikabatandukanya burundu n’umukungugu n’ubushuhe mu gihe cyo kubibika no kubitwara. Nta kwanduza kwa kabiri kugaragara iyo ufunguye ipaki, bigatuma bihita bikoreshwa mu cyumba cyo gusukura cya Class 100.
Igihe cyo kohereza: 23 Nyakanga-2026