Uturindantoki twa Lijiejing twa santimetero 9 duto twa Chloroprene: Igipimo Gishya mu Kurinda Isuku mu Gukora Ibikoresho Bikoresha Udukoresho

Mu gihe habayeho gukabya gukenera "ndetse nta nenge" mu nganda zikora ibikoresho bya semiconductor, uturindantoki twa Lijie twa santimetero 9 twa chlorine nitrile twabaye ibikoresho by'ingenzi byo kurinda mu nganda zitunganya wafer no mu gupakira chips bitewe n'uko ari nke cyane kandi nta ionic residues ifite ndetse n'isuku nyinshi. Binyuze mu gutunganya ibikoresho byihariye, chlorine iri muri uturindantoki igenzurwa cyane kuri ≤50ppm - ikaba irenze cyane urugero rw'inganda rwa 100ppm. Ibi birinda ingaruka mbi za corrode ion ziterwa no kwimuka kwa chloride ion ku buso bwa wafer, bikubahiriza ibisabwa bikomeye by'inganda zikora ibikoresho bya semiconductor mu kugenzura ubwandu bwa mikorobe.

Mu gihe cyo gukoresha lithography, isuku y'uturindantoki igira ingaruka ku buryo butaziguye ku buryo buboneye bwo gusiga irangi rya photoresist n'ingaruka zo kwangirika. Iki gicuruzwa cyakorewe mu byumba byo gusukura byo mu cyiciro cya 100.000 kandi gikurwaho ivumbi rya laser, kigaragaza ko uduce two hejuru twoherezwa munsi ya 0.2 particles/santimetero kare - byujuje ibisabwa na ISO Class 3 cleanroom. Ibi birinda ko uduce duto dufatana ku buso bwa wafer, bityo bigagabanya inenge za lithography. Igishushanyo cya santimetero 9 gitanga ubwiza bwuzuye kuva ku kuboko kugeza ku kiganza. Bihujwe n'imiterere ya elastic cuff, bitanga ubushobozi bwo gukora neza kandi bikarinda ivumbi gushonga ku mwenge w'amaboko, byuzuza ibisabwa bikomeye kugira ngo ibidukikije bisukure bibe bisukuye mu bikorwa bya lithography.

Mu gihe cy’ibikorwa birimo ibintu bihumanya cyane nko gusya no gutera ion, utu turindantoki tugaragaza ko tudakora neza cyane. Nyuma yo gupimwa amasaha 24 mu bikoresho bisanzwe nka aside hydrofluoric na aside phosphoric, nta kubyimba cyangwa gucikagurika bigaragaza, hamwe n’igipimo cyo guhindura ibiro kiri munsi ya 0.8%. Ibi bitanga uburinzi bwizewe ku ntoki ku bakoresha mu gihe bikuraho ibyago byo kwandura ibiterantoki byangiza uturindantoki. Utubuto tw’intoki dufite imiterere ya 0.02mm ikozwe muri laser, yongera uburyaryate ku kigero cya 35% mu gihe ukoresha uturindantoki twa santimetero 12 kandi bigabanya ibyago byo kunyerera ku kigero cya 60%. Ibi bitanga uburinganire hagati y’umutekano wo kurinda no kudacika intege mu mikorere.

Ubu zemewe n'amategeko ya SEMI F57, utu turindantoki dushyirwa mu nganda zikora ibikoresho byinshi mu nganda zikomeye zirimo SMIC na Hua Hong Semiconductor. Zigabanya igipimo cy'ibisigazwa by'amatafari bya wafer biterwa no gukoranaho n'intoki ku kigero cya 38%, zigaragaza ko ari zo mahitamo meza mu nganda zikora ibikoresho bya semiconductor kugira ngo zirinde isuku n'imikorere myiza.